#FIG 3.2
Portrait
Center
Inches
A4      
100.00
Single
-2
1200 2
6 8550 825 13500 3375
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12595 1725 11695 1725 11845 1875
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12595 1350 11695 1350 11845 1500
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12595 975 11695 975 11845 1125
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12595 2100 11695 2100 11845 2250
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12595 2475 11695 2475 11845 2625
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12595 2850 11695 2850 11845 3000
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12595 3225 11695 3225 11845 3375
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 3
	 10200 2100 9300 2100 9450 2250
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 4
	 10200 975 8700 975 8700 1875 8550 1725
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 4
	 10200 1275 9000 1275 9000 1875 8850 1725
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 4
	 10200 1725 9300 1725 9300 1875 9150 1725
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 4
	 10200 3225 8700 3225 8700 2325 8550 2475
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 4
	 10200 2925 9000 2925 9000 2325 8850 2475
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 4
	 10200 2475 9300 2475 9300 2325 9150 2475
4 1 -1 0 0 0 20 0.0000 4 285 1230 10950 2175 AE:ppp_4\001
4 1 -1 0 0 0 20 0.0000 4 285 810 13050 1800 Se:u_3\001
4 1 -1 0 0 0 20 0.0000 4 285 1230 10950 1800 AE:ppp_3\001
4 1 -1 0 0 0 20 0.0000 4 285 810 13050 1425 Se:u_2\001
4 1 -1 0 0 0 20 0.0000 4 285 1230 10950 1425 AE:ppp_2\001
4 1 -1 0 0 0 20 0.0000 4 285 810 13050 1050 Se:u_1\001
4 1 -1 0 0 0 20 0.0000 4 285 1230 10950 1050 AE:ppp_1\001
4 1 -1 0 0 0 20 0.0000 4 285 1230 10950 2550 AE:ppp_5\001
4 1 -1 0 0 0 20 0.0000 4 285 1230 10950 2925 AE:ppp_6\001
4 1 -1 0 0 0 20 0.0000 4 285 1230 10950 3300 AE:ppp_7\001
4 1 -1 0 0 0 20 0.0000 4 285 810 13050 2550 Se:u_5\001
4 1 -1 0 0 0 20 0.0000 4 285 810 13050 2925 Se:u_6\001
4 1 -1 0 0 0 20 0.0000 4 285 810 13050 3300 Se:u_7\001
4 1 -1 0 0 0 20 0.0000 4 285 810 13050 2175 Se:u_4\001
4 1 -1 0 0 0 20 0.0000 4 210 150 9000 2175 1\001
-6
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2706 7206 3606 7206 3456 7356
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2406 7506 2406 8406 2556 8256
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 3906 7506 3906 8406 4056 8256
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 7208 7208 8108 7208 7958 7358
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 8708 7208 9608 7208 9458 7358
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 8408 7508 8408 8408 8558 8258
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 7208 6908 8108 6008 8108 6233
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 8708 6008 9608 6908 9383 6908
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 9909 7509 9909 8409 10059 8259
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 6908 7508 6908 8408 7058 8258
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 11407 7507 11407 8407 11557 8257
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 11406 5706 11406 4806 11556 4956
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 4206 7206 5106 7206 4956 7356
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 5406 7506 5406 8406 5556 8256
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 4206 6906 5106 6006 5106 6231
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 5405 5705 5405 4805 5555 4955
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2405 5705 2405 4805 2555 4955
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 11707 7207 12607 7207 12457 7357
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 11707 6007 12607 6907 12382 6907
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2105 4205 2105 3305 2255 3455
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2705 4205 2705 3305 2855 3455
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 5706 7206 6606 7206 6456 7356
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 5706 6006 6606 6906 6381 6906
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 2704 6004 3604 6904 3379 6904
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 1208 7208 2108 7208 1958 7358
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 1208 6908 2108 6008 2108 6233
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
	 681 6006 1131 6006
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 906 6906 906 6006 1056 6156
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 12905 6905 12905 6005 13055 6155
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 10207 7207 11107 7207 10957 7357
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
	 10207 6907 11107 6007 11107 6232
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
	 8400 5700 8625 5700
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
	 12900 6000 13125 6000
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
	 12675 6000 12900 6000
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
	 8175 5700 8400 5700
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
	 1501 7801 301 7801 301 5401 1501 5401 1501 7801
2 2 1 2 1 7 1 0 -1 6.000 1 0 0 0 0 5
	 1502 2852 3302 2852 3302 5777 1502 5777 1502 2852
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
	 4501 9001 3301 9001 3301 6301 4501 6301 4501 9001
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
	 6000 9000 4800 9000 4800 4200 6000 4200 6000 9000
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
	 7501 9001 6301 9001 6301 6301 7501 6301 7501 9001
2 4 1 2 1 7 2 0 -1 6.000 0 0 7 0 0 5
	 9000 9000 7800 9000 7800 4200 9000 4200 9000 9000
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
	 10501 9001 9301 9001 9301 6301 10501 6301 10501 9001
2 4 1 2 1 -1 1 0 -1 6.000 0 0 7 0 0 5
	 12000 9000 10800 9000 10800 4200 12000 4200 12000 9000
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
	 13501 7801 12301 7801 12301 5401 13501 5401 13501 7801
2 1 0 1 0 7 100 0 -1 0.000 0 0 -1 0 0 4
	 8700 2100 8400 2100 8400 5700 8550 5550
2 2 1 2 1 7 101 0 -1 6.000 0 0 -1 0 0 5
	 8100 600 13800 600 13800 3600 8100 3600 8100 600
4 1 -1 0 0 0 20 0.0000 4 210 150 2406 7281 0\001
4 1 -1 0 0 0 20 0.0000 4 285 690 3906 8781 I:m_1\001
4 1 -1 0 0 0 20 0.0000 4 285 705 2405 8780 R:b_1\001
4 1 -1 0 0 0 20 0.0000 4 210 150 2405 6080 0\001
4 1 -1 0 0 0 20 0.0000 4 210 150 3906 7281 1\001
4 1 -1 0 0 0 20 0.0000 4 210 150 8408 7283 0\001
4 1 -1 0 0 0 20 0.0000 4 210 150 8408 6083 0\001
4 1 -1 0 0 0 20 0.0000 4 285 705 8483 8783 R:b_3\001
4 1 -1 0 0 0 20 0.0000 4 285 690 9906 8781 I:m_3\001
4 1 -1 0 0 0 20 0.0000 4 285 690 6905 8780 I:m_2\001
4 1 -1 0 0 0 20 0.0000 4 210 150 11407 7282 0\001
4 1 -1 0 0 0 20 0.0000 4 210 150 11407 6082 0\001
4 1 -1 0 0 0 20 0.0000 4 285 645 11406 4581 C:k_t\001
4 1 -1 0 0 0 20 0.0000 4 285 645 11482 8782 R:b_t\001
4 1 -1 0 0 0 20 0.0000 4 210 150 5406 7281 0\001
4 1 -1 0 0 0 20 0.0000 4 210 150 5406 6081 0\001
4 1 -1 0 0 0 20 0.0000 4 285 705 5481 8781 R:b_2\001
4 1 -1 0 0 0 20 0.0000 4 210 150 12909 7284 1\001
4 1 -1 0 0 0 20 0.0000 4 210 150 6908 7283 1\001
4 1 -1 0 0 0 20 0.0000 4 210 150 2404 4579 1\001
4 1 -1 0 0 0 20 0.0000 4 285 705 2779 3154 C:p_1\001
4 1 -1 0 0 0 20 0.0000 4 285 705 2104 3154 R:d_1\001
4 1 -1 0 0 0 20 0.0000 4 210 150 910 7285 1\001
4 1 -1 0 0 0 20 0.0000 4 285 765 902 5777 Sf:v_b\001
4 1 -1 0 0 0 20 0.0000 4 285 735 12905 5780 De:f_t\001
4 1 -1 0 0 0 20 0.0000 4 210 150 9909 7284 1\001
4 1 -1 0 0 0 20 0.0000 4 285 705 5405 4580 C:k_2\001
4 1 1 1 0 3 20 0.0000 4 210 1515 3901 9301 Macro mass\001
4 1 1 1 0 3 20 0.0000 4 210 1770 2401 2776 Macro control\001
4 1 1 1 0 3 20 0.0000 4 210 1470 900 8100 Macro base\001
4 1 1 1 0 3 20 0.0000 4 285 1845 5400 4050 Compliant link\001
4 1 1 1 0 3 20 0.0000 4 210 1425 6901 9301 Micro mass\001
4 1 1 1 0 3 20 0.0000 4 210 1860 8475 4050 Micro actuator\001
4 1 1 1 0 3 20 0.0000 4 285 1095 9901 9301 Tip mass\001
4 1 1 1 0 3 20 0.0000 4 285 2940 11400 4050 Compliant environment\001
4 1 1 1 0 3 20 0.0000 4 285 1275 12901 8101 Tip sensor\001
4 1 1 1 0 3 20 0.0000 4 285 2370 6750 1275 Open-loop control\001
