#FIG 3.1
Portrait
Center
Inches
1200 2
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
2706 4806 3606 4806 3456 4956
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
2406 5106 2406 6006 2556 5856
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
3906 5106 3906 6006 4056 5856
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
7208 4808 8108 4808 7958 4958
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
8708 4808 9608 4808 9458 4958
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
8408 5108 8408 6008 8558 5858
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
7208 4508 8108 3608 8108 3833
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
8708 3608 9608 4508 9383 4508
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
9909 5109 9909 6009 10059 5859
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
6908 5108 6908 6008 7058 5858
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
8405 2405 8405 3305 8555 3155
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
11407 5107 11407 6007 11557 5857
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
11406 3306 11406 2406 11556 2556
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
4206 4806 5106 4806 4956 4956
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
5406 5106 5406 6006 5556 5856
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
4206 4506 5106 3606 5106 3831
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
5405 3305 5405 2405 5555 2555
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
2405 3305 2405 2405 2555 2555
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
11707 4807 12607 4807 12457 4957
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
11707 3607 12607 4507 12382 4507
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
2105 1805 2105 905 2255 1055
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
2705 1805 2705 905 2855 1055
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
5706 4806 6606 4806 6456 4956
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
5706 3606 6606 4506 6381 4506
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
2704 3604 3604 4504 3379 4504
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
1208 4808 2108 4808 1958 4958
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
1208 4508 2108 3608 2108 3833
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
681 3606 1131 3606
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
906 4506 906 3606 1056 3756
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
12905 4505 12905 3605 13055 3755
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
10207 4807 11107 4807 10957 4957
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 3
10207 4507 11107 3607 11107 3832
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
8400 3300 8625 3300
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
12900 3600 13125 3600
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
12675 3600 12900 3600
2 1 0 1 -1 7 0 0 -1 0.000 0 0 -1 0 0 2
8175 3300 8400 3300
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
1501 5401 301 5401 301 3001 1501 3001 1501 5401
2 2 1 2 1 7 1 0 -1 6.000 1 0 0 0 0 5
1502 452 3302 452 3302 3377 1502 3377 1502 452
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
4501 6601 3301 6601 3301 3901 4501 3901 4501 6601
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
6000 6600 4800 6600 4800 1800 6000 1800 6000 6600
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
7501 6601 6301 6601 6301 3901 7501 3901 7501 6601
2 4 1 2 1 7 2 0 -1 6.000 0 0 7 0 0 5
9000 6600 7800 6600 7800 1800 9000 1800 9000 6600
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
10501 6601 9301 6601 9301 3901 10501 3901 10501 6601
2 4 1 2 1 -1 1 0 -1 6.000 0 0 7 0 0 5
12000 6600 10800 6600 10800 1800 12000 1800 12000 6600
2 4 1 2 1 7 1 0 -1 6.000 0 0 7 0 0 5
13501 5401 12301 5401 12301 3001 13501 3001 13501 5401
4 1 -1 0 0 0 20 0.0000000 4 210 150 2406 4881 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 3906 6381 I:m1\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 2405 6380 R:b1\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 2405 3680 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 3906 4881 1\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 8408 4883 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 8408 3683 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 8483 6383 R:b3\001
4 1 -1 0 0 0 20 0.0000000 4 210 675 8407 2182 SS:f2\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 9906 6381 I:m3\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 6905 6380 I:m2\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 11407 4882 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 11407 3682 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 525 11406 2181 C:kt\001
4 1 -1 0 0 0 20 0.0000000 4 210 525 11482 6382 R:bt\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 5406 4881 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 5406 3681 0\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 5481 6381 R:b2\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 12909 4884 1\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 6908 4883 1\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 2404 2179 1\001
4 1 -1 0 0 0 20 0.0000000 4 270 585 2779 754 C:p1\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 2104 754 R:d1\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 910 4885 1\001
4 1 -1 0 0 0 20 0.0000000 4 210 675 902 3377 SS:fb\001
4 1 -1 0 0 0 20 0.0000000 4 210 615 12905 3380 SS:ft\001
4 1 -1 0 0 0 20 0.0000000 4 210 150 9909 4884 1\001
4 1 -1 0 0 0 20 0.0000000 4 210 585 5405 2180 C:k2\001
4 1 1 1 0 3 20 0.0000000 4 240 1530 3901 6901 Macro mass\001
4 1 1 1 0 3 20 0.0000000 4 240 1800 2401 376 Macro control\001
4 1 1 1 0 3 20 0.0000000 4 240 1455 900 5700 Macro base\001
4 1 1 1 0 3 20 0.0000000 4 270 1890 5400 1650 Compliant link\001
4 1 1 1 0 3 20 0.0000000 4 240 1470 6901 6901 Micro mass\001
4 1 1 1 0 3 20 0.0000000 4 240 1890 8475 1650 Micro actuator\001
4 1 1 1 0 3 20 0.0000000 4 270 1125 9901 6901 Tip mass\001
4 1 1 1 0 3 20 0.0000000 4 270 2985 11400 1650 Compliant environment\001
4 1 1 1 0 3 20 0.0000000 4 270 1305 12901 5701 Tip sensor\001